6/24/2011	10:09:05 AM	Program started normally
6/24/2011	10:09:05 AM	Helium valve closed
6/24/2011	10:09:05 AM	H2 valve closed
6/24/2011	10:09:05 AM	BCl3 valve closed
6/24/2011	10:09:05 AM	PH3 valve closed
6/24/2011	10:09:05 AM	SiCl4 pre valve closed
6/24/2011	10:09:05 AM	SiCl4 post valve closed
6/24/2011	10:09:05 AM	Main Vac valve closed
6/24/2011	10:09:05 AM	Bypass valve closed
6/24/2011	10:09:05 AM	Bubbler valve closed
6/24/2011	10:09:05 AM	Helium MFC set to  0.000000
6/24/2011	10:09:05 AM	H2 MFC set to  0.000000
6/24/2011	10:09:05 AM	BCl3 MFC set to  0.000000
6/24/2011	10:09:05 AM	PHl3 MFC set to  0.000000
6/24/2011	10:09:05 AM	SiCl4 MFC set to  0.000000
6/24/2011	10:09:05 AM	Bypass solenoid MFC set to  760.000000
6/24/2011	10:09:05 AM	Tube furnace set to 0
6/24/2011	10:09:08 AM	Bypass valve opened
6/24/2011	10:09:09 AM	Bypass valve closed
6/24/2011	10:09:10 AM	Main Vac valve opened
6/24/2011	10:09:11 AM	Main Vac valve closed
6/24/2011	10:21:58 AM	SiCl4 post valve opened
6/24/2011	10:21:59 AM	SiCl4 post valve closed
6/24/2011	10:22:00 AM	SiCl4 pre valve opened
6/24/2011	10:22:00 AM	SiCl4 pre valve closed
6/24/2011	10:22:01 AM	SiCl4 post valve opened
6/24/2011	10:22:02 AM	SiCl4 post valve closed
6/24/2011	10:22:28 AM	SiCl4 pre valve opened
6/24/2011	10:22:29 AM	SiCl4 pre valve closed
6/24/2011	10:23:46 AM	Bubbler valve opened
6/24/2011	10:23:46 AM	Bubbler valve closed
6/24/2011	10:25:08 AM	Bubbler valve opened
6/24/2011	10:25:10 AM	Bubbler valve closed
6/24/2011	10:43:09 AM	Program exited cleanly
6/24/2011	10:50:46 AM	Program started normally
6/24/2011	10:50:46 AM	Helium valve closed
6/24/2011	10:50:46 AM	H2 valve closed
6/24/2011	10:50:46 AM	BCl3 valve closed
6/24/2011	10:50:46 AM	PH3 valve closed
6/24/2011	10:50:46 AM	SiCl4 pre valve closed
6/24/2011	10:50:46 AM	SiCl4 post valve closed
6/24/2011	10:50:46 AM	Main Vac valve closed
6/24/2011	10:50:46 AM	Bypass valve closed
6/24/2011	10:50:46 AM	Bubbler valve closed
6/24/2011	10:50:46 AM	Helium MFC set to  0.000000
6/24/2011	10:50:46 AM	H2 MFC set to  0.000000
6/24/2011	10:50:46 AM	BCl3 MFC set to  0.000000
6/24/2011	10:50:46 AM	PHl3 MFC set to  0.000000
6/24/2011	10:50:46 AM	SiCl4 MFC set to  0.000000
6/24/2011	10:50:46 AM	Bypass solenoid MFC set to  760.000000
6/24/2011	10:50:46 AM	Tube furnace set to 0
6/24/2011	10:57:28 AM	Bypass valve opened
6/24/2011	10:59:55 AM	Helium valve opened
6/24/2011	10:59:56 AM	Helium valve closed
6/24/2011	10:59:59 AM	Helium MFC set to  200.000000
6/24/2011	11:00:00 AM	Helium valve opened
6/24/2011	11:00:05 AM	Helium valve closed
6/24/2011	11:00:10 AM	Helium MFC set to  0.000000
6/24/2011	11:00:49 AM	SiCl4 post valve opened
6/24/2011	11:38:17 AM	SiCl4 post valve closed
6/24/2011	11:39:57 AM	SiCl4 post valve opened
6/24/2011	11:40:39 AM	SiCl4 post valve closed
6/24/2011	11:41:14 AM	Bypass valve closed
6/24/2011	11:41:14 AM	Main Vac valve opened
6/24/2011	11:41:54 AM	SiCl4 post valve opened
6/24/2011	12:08:29 PM	SiCl4 pre valve opened
6/24/2011	12:08:29 PM	SiCl4 pre valve closed
6/24/2011	12:08:30 PM	SiCl4 pre valve opened
6/24/2011	12:08:31 PM	SiCl4 pre valve closed
6/24/2011	12:11:27 PM	SiCl4 post valve closed
6/24/2011	12:11:31 PM	Main Vac valve closed
6/24/2011	12:11:45 PM	Main Vac valve opened
6/24/2011	12:24:28 PM	Main Vac valve closed
6/24/2011	12:24:51 PM	Main Vac valve opened
6/24/2011	12:31:07 PM	Main Vac valve closed
6/24/2011	12:31:48 PM	Main Vac valve opened
6/24/2011	12:32:39 PM	Main Vac valve closed
6/24/2011	12:32:44 PM	Main Vac valve opened
6/24/2011	12:34:08 PM	Main Vac valve closed
6/24/2011	12:34:14 PM	Main Vac valve opened
6/24/2011	12:49:16 PM	Main Vac valve closed
6/24/2011	12:49:18 PM	Program exited cleanly
6/24/2011	1:04:06 PM	Program started normally
6/24/2011	1:04:06 PM	Helium valve closed
6/24/2011	1:04:06 PM	H2 valve closed
6/24/2011	1:04:06 PM	BCl3 valve closed
6/24/2011	1:04:06 PM	PH3 valve closed
6/24/2011	1:04:06 PM	SiCl4 pre valve closed
6/24/2011	1:04:06 PM	SiCl4 post valve closed
6/24/2011	1:04:06 PM	Main Vac valve closed
6/24/2011	1:04:06 PM	Bypass valve closed
6/24/2011	1:04:06 PM	Bubbler valve closed
6/24/2011	1:04:06 PM	Helium MFC set to  0.000000
6/24/2011	1:04:06 PM	H2 MFC set to  0.000000
6/24/2011	1:04:06 PM	BCl3 MFC set to  0.000000
6/24/2011	1:04:06 PM	PHl3 MFC set to  0.000000
6/24/2011	1:04:06 PM	SiCl4 MFC set to  0.000000
6/24/2011	1:04:06 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	1:04:06 PM	Tube furnace set to 0
6/24/2011	1:04:11 PM	Program exited cleanly
6/24/2011	2:30:29 PM	Program started normally
6/24/2011	2:30:29 PM	Helium valve closed
6/24/2011	2:30:29 PM	H2 valve closed
6/24/2011	2:30:29 PM	BCl3 valve closed
6/24/2011	2:30:29 PM	PH3 valve closed
6/24/2011	2:30:29 PM	SiCl4 pre valve closed
6/24/2011	2:30:29 PM	SiCl4 post valve closed
6/24/2011	2:30:29 PM	Main Vac valve closed
6/24/2011	2:30:29 PM	Bypass valve closed
6/24/2011	2:30:29 PM	Bubbler valve closed
6/24/2011	2:30:29 PM	Helium MFC set to  0.000000
6/24/2011	2:30:29 PM	H2 MFC set to  0.000000
6/24/2011	2:30:29 PM	BCl3 MFC set to  0.000000
6/24/2011	2:30:29 PM	PHl3 MFC set to  0.000000
6/24/2011	2:30:29 PM	SiCl4 MFC set to  0.000000
6/24/2011	2:30:29 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	2:30:30 PM	Tube furnace set to 0
6/24/2011	2:30:57 PM	Main Vac valve opened
6/24/2011	2:30:59 PM	Main Vac valve closed
6/24/2011	2:31:11 PM	Program exited cleanly
6/24/2011	2:31:18 PM	Program started normally
6/24/2011	2:31:18 PM	Helium valve closed
6/24/2011	2:31:18 PM	H2 valve closed
6/24/2011	2:31:18 PM	BCl3 valve closed
6/24/2011	2:31:18 PM	PH3 valve closed
6/24/2011	2:31:18 PM	SiCl4 pre valve closed
6/24/2011	2:31:18 PM	SiCl4 post valve closed
6/24/2011	2:31:18 PM	Main Vac valve closed
6/24/2011	2:31:18 PM	Bypass valve closed
6/24/2011	2:31:18 PM	Bubbler valve closed
6/24/2011	2:31:18 PM	Helium MFC set to  0.000000
6/24/2011	2:31:18 PM	H2 MFC set to  0.000000
6/24/2011	2:31:18 PM	BCl3 MFC set to  0.000000
6/24/2011	2:31:18 PM	PHl3 MFC set to  0.000000
6/24/2011	2:31:18 PM	SiCl4 MFC set to  0.000000
6/24/2011	2:31:18 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	2:31:18 PM	Tube furnace set to 0
6/24/2011	2:31:35 PM	Program exited cleanly
6/24/2011	2:35:17 PM	Program started normally
6/24/2011	2:35:18 PM	Helium valve closed
6/24/2011	2:35:18 PM	H2 valve closed
6/24/2011	2:35:18 PM	BCl3 valve closed
6/24/2011	2:35:18 PM	PH3 valve closed
6/24/2011	2:35:18 PM	SiCl4 pre valve closed
6/24/2011	2:35:18 PM	SiCl4 post valve closed
6/24/2011	2:35:18 PM	Main Vac valve closed
6/24/2011	2:35:18 PM	Bypass valve closed
6/24/2011	2:35:18 PM	Bubbler valve closed
6/24/2011	2:35:18 PM	Helium MFC set to  0.000000
6/24/2011	2:35:18 PM	H2 MFC set to  0.000000
6/24/2011	2:35:18 PM	BCl3 MFC set to  0.000000
6/24/2011	2:35:18 PM	PHl3 MFC set to  0.000000
6/24/2011	2:35:18 PM	SiCl4 MFC set to  0.000000
6/24/2011	2:35:18 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	2:35:18 PM	Tube furnace set to 0
6/24/2011	2:35:24 PM	Program exited cleanly
6/24/2011	2:35:45 PM	Program started normally
6/24/2011	2:35:45 PM	Helium valve closed
6/24/2011	2:35:45 PM	H2 valve closed
6/24/2011	2:35:45 PM	BCl3 valve closed
6/24/2011	2:35:45 PM	PH3 valve closed
6/24/2011	2:35:45 PM	SiCl4 pre valve closed
6/24/2011	2:35:45 PM	SiCl4 post valve closed
6/24/2011	2:35:45 PM	Main Vac valve closed
6/24/2011	2:35:45 PM	Bypass valve closed
6/24/2011	2:35:45 PM	Bubbler valve closed
6/24/2011	2:35:45 PM	Helium MFC set to  0.000000
6/24/2011	2:35:45 PM	H2 MFC set to  0.000000
6/24/2011	2:35:45 PM	BCl3 MFC set to  0.000000
6/24/2011	2:35:45 PM	PHl3 MFC set to  0.000000
6/24/2011	2:35:45 PM	SiCl4 MFC set to  0.000000
6/24/2011	2:35:45 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	2:35:45 PM	Tube furnace set to 0
6/24/2011	2:35:53 PM	Main Vac valve opened
6/24/2011	2:35:55 PM	Main Vac valve closed
6/24/2011	3:16:38 PM	Program exited cleanly
6/24/2011	3:16:49 PM	Program started normally
6/24/2011	3:16:49 PM	Helium valve closed
6/24/2011	3:16:49 PM	H2 valve closed
6/24/2011	3:16:49 PM	BCl3 valve closed
6/24/2011	3:16:49 PM	PH3 valve closed
6/24/2011	3:16:49 PM	SiCl4 pre valve closed
6/24/2011	3:16:49 PM	SiCl4 post valve closed
6/24/2011	3:16:49 PM	Main Vac valve closed
6/24/2011	3:16:49 PM	Bypass valve closed
6/24/2011	3:16:49 PM	Bubbler valve closed
6/24/2011	3:16:49 PM	Helium MFC set to  0.000000
6/24/2011	3:16:49 PM	H2 MFC set to  0.000000
6/24/2011	3:16:49 PM	BCl3 MFC set to  0.000000
6/24/2011	3:16:49 PM	PHl3 MFC set to  0.000000
6/24/2011	3:16:49 PM	SiCl4 MFC set to  0.000000
6/24/2011	3:16:49 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	3:16:49 PM	Tube furnace set to 0
6/24/2011	3:16:58 PM	Program exited cleanly
6/24/2011	3:44:15 PM	Program started normally
6/24/2011	3:44:15 PM	Helium valve closed
6/24/2011	3:44:15 PM	H2 valve closed
6/24/2011	3:44:15 PM	BCl3 valve closed
6/24/2011	3:44:15 PM	PH3 valve closed
6/24/2011	3:44:15 PM	SiCl4 pre valve closed
6/24/2011	3:44:15 PM	SiCl4 post valve closed
6/24/2011	3:44:15 PM	Main Vac valve closed
6/24/2011	3:44:15 PM	Bypass valve closed
6/24/2011	3:44:15 PM	Bubbler valve closed
6/24/2011	3:44:15 PM	Helium MFC set to  0.000000
6/24/2011	3:44:15 PM	H2 MFC set to  0.000000
6/24/2011	3:44:15 PM	BCl3 MFC set to  0.000000
6/24/2011	3:44:15 PM	PHl3 MFC set to  0.000000
6/24/2011	3:44:15 PM	SiCl4 MFC set to  0.000000
6/24/2011	3:44:15 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	3:44:15 PM	Tube furnace set to 0
6/24/2011	3:44:20 PM	Program exited cleanly
6/24/2011	3:44:26 PM	Program started normally
6/24/2011	3:44:26 PM	Helium valve closed
6/24/2011	3:44:26 PM	H2 valve closed
6/24/2011	3:44:26 PM	BCl3 valve closed
6/24/2011	3:44:26 PM	PH3 valve closed
6/24/2011	3:44:26 PM	SiCl4 pre valve closed
6/24/2011	3:44:26 PM	SiCl4 post valve closed
6/24/2011	3:44:26 PM	Main Vac valve closed
6/24/2011	3:44:26 PM	Bypass valve closed
6/24/2011	3:44:26 PM	Bubbler valve closed
6/24/2011	3:44:26 PM	Helium MFC set to  0.000000
6/24/2011	3:44:26 PM	H2 MFC set to  0.000000
6/24/2011	3:44:26 PM	BCl3 MFC set to  0.000000
6/24/2011	3:44:26 PM	PHl3 MFC set to  0.000000
6/24/2011	3:44:26 PM	SiCl4 MFC set to  0.000000
6/24/2011	3:44:26 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	3:44:26 PM	Tube furnace set to 0
6/24/2011	3:44:37 PM	Program exited cleanly
6/24/2011	3:45:13 PM	Program started normally
6/24/2011	3:45:13 PM	Helium valve closed
6/24/2011	3:45:13 PM	H2 valve closed
6/24/2011	3:45:13 PM	BCl3 valve closed
6/24/2011	3:45:13 PM	PH3 valve closed
6/24/2011	3:45:13 PM	SiCl4 pre valve closed
6/24/2011	3:45:13 PM	SiCl4 post valve closed
6/24/2011	3:45:13 PM	Main Vac valve closed
6/24/2011	3:45:13 PM	Bypass valve closed
6/24/2011	3:45:13 PM	Bubbler valve closed
6/24/2011	3:45:13 PM	Helium MFC set to  0.000000
6/24/2011	3:45:13 PM	H2 MFC set to  0.000000
6/24/2011	3:45:13 PM	BCl3 MFC set to  0.000000
6/24/2011	3:45:13 PM	PHl3 MFC set to  0.000000
6/24/2011	3:45:13 PM	SiCl4 MFC set to  0.000000
6/24/2011	3:45:13 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	3:45:13 PM	Tube furnace set to 0
6/24/2011	3:46:01 PM	Program exited cleanly
6/24/2011	3:46:25 PM	Program started normally
6/24/2011	3:46:25 PM	Helium valve closed
6/24/2011	3:46:25 PM	H2 valve closed
6/24/2011	3:46:25 PM	BCl3 valve closed
6/24/2011	3:46:25 PM	PH3 valve closed
6/24/2011	3:46:25 PM	SiCl4 pre valve closed
6/24/2011	3:46:25 PM	SiCl4 post valve closed
6/24/2011	3:46:25 PM	Main Vac valve closed
6/24/2011	3:46:25 PM	Bypass valve closed
6/24/2011	3:46:25 PM	Bubbler valve closed
6/24/2011	3:46:25 PM	Helium MFC set to  0.000000
6/24/2011	3:46:25 PM	H2 MFC set to  0.000000
6/24/2011	3:46:25 PM	BCl3 MFC set to  0.000000
6/24/2011	3:46:25 PM	PHl3 MFC set to  0.000000
6/24/2011	3:46:25 PM	SiCl4 MFC set to  0.000000
6/24/2011	3:46:25 PM	Bypass solenoid MFC set to  760.000000
6/24/2011	3:46:25 PM	Tube furnace set to 0
6/24/2011	4:55:49 PM	Recipe started at 4:55 PM
6/24/2011	4:55:49 PM	Helium valve closed
6/24/2011	4:55:49 PM	H2 valve closed
6/24/2011	4:55:49 PM	BCl3 valve closed
6/24/2011	4:55:49 PM	PH3 valve closed
6/24/2011	4:55:49 PM	SiCl4 pre valve closed
6/24/2011	4:55:49 PM	SiCl4 post valve closed
6/24/2011	4:55:49 PM	Main Vac valve closed
6/24/2011	4:55:49 PM	Bubbler valve closed
6/24/2011	4:55:49 PM	Bypass valve opened
6/24/2011	4:55:49 PM	Helium MFC set to  0.000000
6/24/2011	4:55:49 PM	H2 MFC set to  0.000000
6/24/2011	4:55:49 PM	BCl3 MFC set to  0.000000
6/24/2011	4:55:49 PM	PHl3 MFC set to  0.000000
6/24/2011	4:55:49 PM	SiCl4 MFC set to  0.000000
6/24/2011	4:55:49 PM	Bypass solenoid MFC set to  0.000000
6/24/2011	4:55:49 PM	Tube furnace set to 0
6/24/2011	4:58:36 PM	Helium valve closed
6/24/2011	4:58:36 PM	H2 valve closed
6/24/2011	4:58:36 PM	BCl3 valve closed
6/24/2011	4:58:36 PM	PH3 valve closed
6/24/2011	4:58:36 PM	SiCl4 pre valve closed
6/24/2011	4:58:36 PM	SiCl4 post valve closed
6/24/2011	4:58:36 PM	Main Vac valve closed
6/24/2011	4:58:36 PM	Bubbler valve closed
6/24/2011	4:58:36 PM	Bypass valve opened
6/24/2011	4:58:36 PM	Helium MFC set to  0.000000
6/24/2011	4:58:36 PM	H2 MFC set to  0.000000
6/24/2011	4:58:36 PM	BCl3 MFC set to  0.000000
6/24/2011	4:58:36 PM	PHl3 MFC set to  0.000000
6/24/2011	4:58:36 PM	SiCl4 MFC set to  0.000000
6/24/2011	4:58:36 PM	Bypass solenoid MFC set to  0.000000
6/24/2011	4:58:36 PM	Tube furnace set to 0
6/24/2011	4:59:36 PM	Helium valve closed
6/24/2011	4:59:36 PM	H2 valve closed
6/24/2011	4:59:36 PM	BCl3 valve closed
6/24/2011	4:59:36 PM	PH3 valve closed
6/24/2011	4:59:36 PM	SiCl4 pre valve closed
6/24/2011	4:59:36 PM	SiCl4 post valve closed
6/24/2011	4:59:36 PM	Bypass valve closed
6/24/2011	4:59:36 PM	Bubbler valve closed
6/24/2011	4:59:36 PM	Main Vac valve opened
6/24/2011	4:59:36 PM	Helium MFC set to  0.000000
6/24/2011	4:59:36 PM	H2 MFC set to  0.000000
6/24/2011	4:59:36 PM	BCl3 MFC set to  0.000000
6/24/2011	4:59:36 PM	PHl3 MFC set to  0.000000
6/24/2011	4:59:36 PM	SiCl4 MFC set to  0.000000
6/24/2011	4:59:36 PM	Bypass solenoid MFC set to  0.000000
6/24/2011	4:59:36 PM	Tube furnace set to 0
6/24/2011	4:59:37 PM	Run finished at 4:59 PM
